LU, Yutong; ZHOU, Ji; KANG, Xia; ZHU, Xianchang; LIU, Junbo; WANG, Jian; HU, Song. Low-order Wavefront Error Compensation for Multi-field of Lithography Projection Objective Based on Interior Point Method. Instrumentation, [S. l.], v. 9, n. 3, 2022. DOI: 10.15878/j.cnki.instrumentation.2022.03.004. Disponível em: https://editorial.instrumentationjournal.com/index.php/instr/article/view/47. Acesso em: 23 nov. 2024.