Lu, Yutong, Ji Zhou, Xia Kang, Xianchang Zhu, Junbo Liu, Jian Wang, and Song Hu. 2022. “Low-Order Wavefront Error Compensation for Multi-Field of Lithography Projection Objective Based on Interior Point Method”. Instrumentation 9 (3). https://doi.org/10.15878/j.cnki.instrumentation.2022.03.004.