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Articles

Vol. 11 No. 2 (2024): Instrumentation Volume 11 Issue 2

Polarization Band Effect and MEMS-based Plasma Generation

  • Henggao Ding
  • Zhongyu Hou
DOI
https://doi.org/10.15878/j.instr.202400195
Submitted
June 13, 2024
Published
2024-06-30

Abstract

We find that effects resulted from micro/nano scale structures can regulate space charges which excite and lead to the special electric field distribution featuring the flux convergence band structure. It is here referred to as the polarization band effect, which stems from the specific field induced interactions among atoms and molecules. The micro/nano electrode array structures were designed and fabricated using the non-silicon micro/nano processing technology, forming micro/nano electrode arrays-based plasma microelectromechanical systems (NPMEMS). The integrated NPMEMS device can be used to regulate inner energy states of matters and generate plasma based on the polarization band effect, all within a single chip-size limited local area or extending into a large volume space with the deployment of a distributed array of multiple devices. Its special physical and chemical properties can be utilized to greatly improve the efficiency of potential application systems or solve mechanism-level challenges in plasma-related applications of multiple fields.

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