A novel wireless and passive surface acoustic wave (SAW) sensor is developed for measuring temperature and pressure. The sensor has two single-port resonators on a substrate. One resonator, acting as the temperature sensor, is located at the fixed end without pressure deformation, and the other one, acting as the pressure sensor, is located at the free end to detect pressure changes due to substrate deformation. Pressure at the free end bends the cantilever, causing a relative change in the acoustic propagation characteristics of the SAW traveling along the surface of the substrate and a relative change in the resonant frequency of the resulting signal. The temperature acts on the entire substrate, affecting the propagation speed of the SAW on the substrate and directly affecting the resonant frequency characteristic parameters. The temperature and pressure performance of this new antenna-connected sensor is tested by using a network analyzer, a constant temperature heating station, and a force gauge. A temperature sensitivity of 1.5015 kHz/°C and a pressure sensitivity of 10.6 kHz/gf at the ambient temperature have been observed by wireless measurements. This work should result in practical engineering applications for high-temperature devices.
You may also start an advanced similarity search for this article.